The creation of the narrow electron and ion beams for a modification of a surface in nanometric scale

Abstract

The methods of creation of the point sources of electrons and ions with localization of emission in a small angle based on field electron emission and field evaporation are considered. Examples of creation of such sources with use of emitters from pure metals, alloys and complex multicomponent compounds are given. Application of all described methods in a combination to a variety of materials of emitters enabler to create a great set of the point sources of the charged particles with various properties.