Formation of micro-groove on diamond by femtosecond laser micromachining

Ryoji Maruyama, T. Tamaki, W. Watanabe
{"title":"Formation of micro-groove on diamond by femtosecond laser micromachining","authors":"Ryoji Maruyama, T. Tamaki, W. Watanabe","doi":"10.1117/12.2542281","DOIUrl":null,"url":null,"abstract":"Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.","PeriodicalId":131350,"journal":{"name":"Micro + Nano Materials, Devices, and Applications","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro + Nano Materials, Devices, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2542281","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.
飞秒激光微加工金刚石微沟槽的形成
激光加工金刚石引起了人们的关注。超短激光脉冲可用于金刚石和块状金刚石的微结构加工。本文报道了用重复频率为1khz的飞秒激光脉冲进行金刚石表面结构的激光参数。通过改变扫描速度和能量,可以刻出不同类型的凹槽。研究了沟槽的形貌和深度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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