Introduction of the new high voltage, engineering (HVE) accelerator for high energy/high current ion implantation

Abstract

A new series of coaxial Tandetron™ tandem accelerators that meet today's requirements on new applications including new trends in device manufacturing has been designed, manufactured and tested by HVE. This new design includes a new high current all-solid-state power supply constructed around the high-energy section, offering a smaller footprint in addition to higher reliability and reduced maintenance. With terminal voltage up to 5MV and electrical power for beam transport up to 25kW the new 1MV, 2MV, 3MV and 5MV HVE Coaxial Tandetron™ accelerators are able to accelerate milliampere beams of virtually all ion masses to energies ranging from 60keV to over 25MeV.