{"title":"Efficient silicon nitride grating coupler with a dielectric multilayer reflector","authors":"Jianxun Hong, S. Yokoyama","doi":"10.23919/MOC.2017.8244493","DOIUrl":null,"url":null,"abstract":"A highly efficient grating coupler with a dielectric multilayer reflector for silicon nitride photonic integrated circuits was proposed. Design, fabrication and optical characterization were presented. The peak coupling efficiency and 3 dB bandwidth are −4.5 dB and 68.0 nm, respectively. The fabrication process is CMOS-compatible with only one etching step.","PeriodicalId":123743,"journal":{"name":"2017 22nd Microoptics Conference (MOC)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 22nd Microoptics Conference (MOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MOC.2017.8244493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A highly efficient grating coupler with a dielectric multilayer reflector for silicon nitride photonic integrated circuits was proposed. Design, fabrication and optical characterization were presented. The peak coupling efficiency and 3 dB bandwidth are −4.5 dB and 68.0 nm, respectively. The fabrication process is CMOS-compatible with only one etching step.