Lin Shi, Yingjin Pan, Zhihai Zhang, Jie Zhang, Weiwei, Wei Wang
{"title":"Analysis and experiment of surface bending to grating light modulator","authors":"Lin Shi, Yingjin Pan, Zhihai Zhang, Jie Zhang, Weiwei, Wei Wang","doi":"10.1109/IPFA.2009.5232639","DOIUrl":null,"url":null,"abstract":"The effects of diffraction characteristics that the surface bending to two dimension grating light modulators is discussed in this paper. With consideration of surface bending, a corresponding model is built based on experimental data, and then the effects of different bending to the modulation results have been calculated which is testified by experiments.","PeriodicalId":210619,"journal":{"name":"2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2009.5232639","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The effects of diffraction characteristics that the surface bending to two dimension grating light modulators is discussed in this paper. With consideration of surface bending, a corresponding model is built based on experimental data, and then the effects of different bending to the modulation results have been calculated which is testified by experiments.