Chip/package co-analysis of thermo-mechanical stress and reliability in TSV-based 3D ICs

Abstract

In this work, we propose a fast and accurate chip/package thermo-mechanical stress and reliability co-analysis tool for TSV-based 3D ICs. We also present a design optimization methodology to alleviate mechanical reliability issues in 3D IC. First, we analyze the stress induced by chip/package interconnect elements, i.e., TSV, μ-bump, and package bump. Second, we explore and validate the principle of lateral and vertical linear superposition of stress tensors (LVLS), considering all chip/package elements. This linear superposition principle is utilized to perform full-chip/package-scale stress simulations and reliability analysis. Finally, we study the mechanical reliability issues in practical 3D chip/package designs including wide-I/O and block-level 3D ICs.