Preliminary investigations into SU-8 as a material for integrated all-optical microwave filters

Abstract

The optical characteristics of the ultrathick negative photoresist SU-8 have been investigated for use in integrated all-optical microwave filters. SU-8 has excellent micromachining properties and optical waveguides can be produced using fast, low cost photolithographical techniques with processing temperatures of less than 100/spl deg/C. This makes it a suitable material for rapid prototyping of integrated optical circuits. Multimode waveguides were fabricated and were found to have a loss of 6 dB/cm at 850 nm.