E. Stratakis, I. Sakellari, S. Droulias, A. Lemonis
{"title":"Femtosecond laser induced all-silicon dielectric metasurfaces assisted by wet chemical etching","authors":"E. Stratakis, I. Sakellari, S. Droulias, A. Lemonis","doi":"10.34133/ultrafastscience.0019","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":268204,"journal":{"name":"Ultrafast Science","volume":"103 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ultrafast Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.34133/ultrafastscience.0019","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}