Electrical and plasma characteristics of 150 kHz band high-power burst inductively coupled plasma

Abstract

Plasma source of an inductively coupled plasma (ICP) driven by high voltage burst pulse has been developed. A 200 ps wide burst of 157 kHz power supply was used to produce plasma with repetition rate of 1 Hz. The electrical and plasma parameters are obtained based on mutual induction circuit model by analyzing waveforms of the coil current and the voltage. The plasma density was also obtained using a double probe measurement. The results showed that electrical power into plasma was obtained as 13.1 kW. The plasma density was obtained to be 1019 m−3 order by the equivalent circuit, which is good agreement with that obtained with probe measurement.