Alternating current approach on Si nanograting FETs for pH sensitivity improvement

Abstract

The pH sensing response of the alternating current (AC) on the source/drain was investigated on lithographically defined Si NGFETs which were modified with APDMES. The sensors were measured under different frequency and the sensitivity was improved (~ 2 to 8 times) in a frequency range from 100Hz to 100KHz, with the maximum of improvement around the cut-off frequency.