Microarray selective epitaxy (MASE) for integrated photonic devices

Abstract

We developed a novel technique, called microarray selective epitaxy (MASE), for selectively growing extremely small PICs. MASE can form densely arrayed (pitch<10 /spl mu/m) multiple-quantum-well (MQW) waveguides, without the need for semiconductor etching, and simultaneously control the bandgap-wavelength of each MQW in the over-300-nm wavelength range.