Nanostructured Functional Film Coatings Formed by Helicon-Arc Ion-Plasma Method on the Polymeric Substrates

Abstract

The technology of low-temperature ion-plasma formation of nanostructured aluminum nitride films on various substrates, including Mylar and Teflon flexible thermolabile polymeric films, was developed. The study of structural and optical characteristics of such nanostructured coatings has shown the possibility to use them as functional films with selective transmissions and barriers in infrared (IR) spectral region. Due to high thermal conductivity and specific optical properties (the Restrahlen band at the wavelengths 10.3-17.9 microns and good transparency in visible and sub-THz spectral regions) AIN thin polycrystalline films on polymeric substrates can be attractive for making IR radiation blocking filters from the background at 300 K and to improve performance of sub-THz low-temperature detectors in ground-based telescopes.