Tunable VCSEL with integrated heater and planar waveguide wavelength monitor

Abstract

A compact solution for tuning and monitoring the emission waveguide of a single mode VCSEL (/spl lambda/=760 nm) at constant output power is presented. The key element within the micro system is a chirped grating waveguide coupler combined with a diffractive collimating lens and a two-segment detector. The resulting wavelength measurement resolution of the chip is in the range of 0.06 nm.