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Corner compensation techniques in anisotropic etching of

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148910
H. Sandmaier, H. Offereins, K. Kuhl, W. Lang
{"title":"Corner compensation techniques in anisotropic etching of","authors":"H. Sandmaier, H. Offereins, K. Kuhl, W. Lang","doi":"10.1109/SENSOR.1991.148910","DOIUrl":null,"url":null,"abstract":"Various compensation structures preventing the undercutting of convex corners of","PeriodicalId":273871,"journal":{"name":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"29","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.1991.148910","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 29

Abstract

Various compensation structures preventing the undercutting of convex corners of
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各向异性刻蚀中的角补偿技术
各种补偿结构，防止凹角的下切
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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
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