Fabrication and modelling of a prototype dual-band HgCdTe infrared detector structure

G. Parish, C. Musca, J.F. Siliquini, J. Antoszewski, J. Dell, B. Nener, L. Faraone, G. Gouws
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引用次数: 0

Abstract

A monolithic HgCdTe photoconductive device structure is presented that is suitable for dual-band optically registered infrared photodetection in the two atmospheric transmission windows of 3-5 /spl mu/m and 8-12 /spl mu/m, which correspond to the mid-wave and long-wave infrared bands; MWIR and LWIR, respectively. The proposed structure employs a wider bandgap isolating layer between the two photosensitive layers such that an effective electrical barrier is formed thus prohibiting carrier transport between the two infrared absorbing layers. A comprehensive device model has been developed and the technology is demonstrated using a mature HgCdTe photoconductive device fabrication process. The fabricated detectors have an MWIR cutoff of 5.0 /spl mu/m, and LWIR cutoff of 10.5 /spl mu/m.
双频HgCdTe红外探测器结构原型的制作与建模
提出了一种单片HgCdTe光导器件结构,适用于3-5 /spl mu/m和8-12 /spl mu/m两个大气透射窗口,分别对应中波和长波红外波段进行双频光配准红外光探测;分别为MWIR和LWIR。所提出的结构在两个光敏层之间采用更宽的带隙隔离层,使得形成有效的电屏障,从而禁止载流子在两个红外吸收层之间传输。开发了一个全面的器件模型,并使用成熟的HgCdTe光导器件制造工艺演示了该技术。所制备的探测器的中长波截止值为5.0 /spl μ m,低长波截止值为10.5 /spl μ m。
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