Fabrication of [CoB/Pd]/sub n/ multilayered perpendicular magnetic recording media using DC magnetron sputtering with N/sub 2/

Abstract

[CoB/Pd]/sub n/ films were prepared with dc magnetron sputtering and the effect of preparation conditions, the addition of N/sub 2/ to Ar gas and heating of substrates during the deposition, on its microstructure and magnetic properties were examined.