Monolithic Mid-IR Methane Gas Sensor with Waveguide-Integrated Detector

Abstract

We demonstrate a monolithic chalcogenide glass spiral waveguide sensor integrated with a PbTe photoconductor detector on-chip for mid-infrared absorption spectroscopic sensing. Current methane gas sensing limit of detection was experimentally measured as 1% by volume, but further optimization should maximize sensitivity to 330 ppmv.