Investigations at High Temperature in Both Equilibrium and Kinetic State with Knudsen Effusion Mass Spectrometry (KEMS) and a Skimmer Integrated Coupling System of Mass Spectrometer and Thermal Analysis (STAMS)

Abstract

Research on materials at high temperatures under equilibrium as well as under kinetic conditions poses a high challenge for any scientist. The investigations of the properties are limited either by the sample holding container or by the instrumentation that should analyze the significant information. Thermodynamic investigation in equilibrium state with the Knudsen effusion mass spectrometer (KEMS) and thermal analysis (DTA/TG/DSC) in quasi equilibrium state at temperatures beyond 1000 °C are main and standard topics in our lab. This article will introduce measurements on aluminum nitride (AlN) as a potential material for application in microelectronics, electronic substrates, chip carriers where high thermal conductivity is essential, and light emitting diodes (LED).