A. L. Sumarev, K. E. Trofimova, A. M. Kitaev, A. V. Ishchenko
{"title":"Laboratory physical vapor deposition coating equipment","authors":"A. L. Sumarev, K. E. Trofimova, A. M. Kitaev, A. V. Ishchenko","doi":"10.1063/5.0093477","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":339823,"journal":{"name":"THE VIII INTERNATIONAL YOUNG RESEARCHERS’ CONFERENCE – PHYSICS, TECHNOLOGY, INNOVATIONS (PTI-2021)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"THE VIII INTERNATIONAL YOUNG RESEARCHERS’ CONFERENCE – PHYSICS, TECHNOLOGY, INNOVATIONS (PTI-2021)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/5.0093477","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}