Progress in Technology CAD for Power Devices, Circuits and Systems

Abstract

Over the past decade, the utilization of technology CAD (TCAD) tools has become widespread in industry and academia. The enormous progress in computing hardware and software technology, together with significant advances in physical modelling accuracy, and speed and robustness of numerical algorithms, have made TCAD to a cost-effective albeit powerful technology that complements experimental approaches to wafer processing and metrology.