An Automated SONOS NVSM Dynamic Characterization System

Abstract

AbsiraeC A completely automated test station for performing exhaustive measurements on nonvolatile semiconductor memories has been designed and implemented. This is very cost effective as it uses in-house built instrumentation. Time-controlled pulses are applied to the device under test making it undergo the different modes of memory operation. Software has been developed to perform series of measurements to generate erase/write, retention and endurance curves of SONOS transistors. The entire apparatus may be controlled by any computer with an IEEE488 bus access. This setup has been used to study the reliability of SONOS devices.