System Level Modeling of Piezo-Resistive Pressure Sensors Including Technology Data and Parasitic Effects

Abstract

Basically, integrated piezoresistive pressure sensors exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of integrated sensing elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful for determining operation characteristics and verifying sensor performance before manufacturing. Thus, the need for test iterations decreases. That is why, cost and time-to-market can be reduced significantly