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Motion systems: An overview of linear, air bearing, and piezo stages

Three-Dimensional Microfabrication Using Two-Photon Polymerization Pub Date : 1900-01-01 DOI:10.1016/B978-0-323-35321-2.00008-X
Maneuf Serge, T. Patrick, F. Duquenoy
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引用次数: 6
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运动系统:线性，空气轴承和压电级的概述
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Three-Dimensional Microfabrication Using Two-Photon Polymerization
Three-Dimensional Microfabrication Using Two-Photon Polymerization
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