Multilayer piezoelectric ceramic actuator for laser scanner

Abstract

This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ∼30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.