The focal plane array based on MIS-photodiodes on InAs for pulse optical data registration

Abstract

The focal plane array (IR FPA) on the basis of metal-insulator-structure (MIS) photodetectors on InAs auto-epitaxial substrate ol 8x8 elements is designed and fabricated. It is shown, that the IR FPA provides definition of coordinate and time of arrival of optical pulse signals with energy 8x10-17 J/element and accuracy not worse 100 ns.