Design of Al/ZnO/Si one-port SAW resonator filter

Abstract

In this paper, we present an analysis and real isation of a ladder-type SAW filter composed of six resonators on the same port. The filter will be developed on a structure with three layers of a ZnO film and aluminium (AI) electrodes on a silicon (Si) substrate with TilAu for metallization in the 925-960MHz frequency band range. Up to now, RF front-end and interstage SAW filters for mobile communication are mainly fabricated on LiNb03 and LiTa03 substrates. A monolithic integration of these filters on semiconductor substrates is highly desirable to miniaturize the outer dimensions of the cellular phones. For analysis, we used the coupling-of-mode (COM) theory for analysing SAW periodic structures such as reflectors and interdigital transducers which has been used by the SAW industry as the standard modelling tool and we found the corresponding insertion loss for our resonator is very small, which will be very helpful in manufacturing corresponding SAW resonator filters.