{"title":"Resonant vacuum gauge","authors":"V. Gorobey, R. Kuvandykov, R. Teteruk","doi":"10.20915/2687-0886-2020-16-1-17-23","DOIUrl":null,"url":null,"abstract":"This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.","PeriodicalId":296769,"journal":{"name":"Reference materials","volume":"92 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Reference materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.20915/2687-0886-2020-16-1-17-23","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.
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