Studies of dielectric characteristics of spin-coated polyimide films

Abstract

Dielectric properties of HTR-3 and PAAC-16 polyimide thin films with thickness ranging from 0.95 to 2.4 /spl mu/m have been measured in the frequency range from 50 kHz to 14 MHz by using a small electrode in MPM system. The frequency dependence of ac conductivity for polyimide HTR-3 and PAAC-16 with thickness of polyimide film about 1.4 /spl mu/m was measured at room temperature. The curves exhibit two dispersive regions in which they had different slope. The dielectric loss and dissipation factor (tan /spl delta/) decrease in the frequency range <400 kHz and increase in the frequency range >400 kHz. With decreasing polyimide film thickness, the dielectric constant decreased.