Fluid PIC Simulation Of Plasma Processing Devices

Abstract

complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.