A. Govyadinov, J. Smith, B. Mackie, F. Charbonier, P. Benning
{"title":"Field emitter with focusing column for atomic resolution storage device","authors":"A. Govyadinov, J. Smith, B. Mackie, F. Charbonier, P. Benning","doi":"10.1109/IVNC.2005.1619622","DOIUrl":null,"url":null,"abstract":"This paper discussed the design and development and fabrication of a focusable electron emitter for atomic resolution storage. The system design includes an electron source with an integrated focusing column and must provide a minimum spot size and maximum efficiency under optimum conditions. Experimental results from the fabricated parts compared well with model spot size predictions.","PeriodicalId":121164,"journal":{"name":"2005 International Vacuum Nanoelectronics Conference","volume":"144 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Vacuum Nanoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2005.1619622","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper discussed the design and development and fabrication of a focusable electron emitter for atomic resolution storage. The system design includes an electron source with an integrated focusing column and must provide a minimum spot size and maximum efficiency under optimum conditions. Experimental results from the fabricated parts compared well with model spot size predictions.