S. Gurin, Cjsc «Medtekhnika», E. Pecherskaya, T. Zinchenko, A. V. Fimin, K. O. Nikolaev
{"title":"STRUCTURES AND TECHNOLOGICAL REGIMES OF FORMING SENSITIVE ELEMENTS OF MICROELECTRONIC SENSORS OF FAST ALTERNATING AND STATIC PRESSURE","authors":"S. Gurin, Cjsc «Medtekhnika», E. Pecherskaya, T. Zinchenko, A. V. Fimin, K. O. Nikolaev","doi":"10.21685/2307-5538-2019-3-13","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":239916,"journal":{"name":"Measuring. Monitoring. Management. Control","volume":"258 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measuring. Monitoring. Management. Control","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21685/2307-5538-2019-3-13","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}