Electrical modeling of strongly-coupled microstrip resonator arrays for microplasma generation

A. Hoskinson, C. Wu, J. Hopwood
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引用次数: 1

Abstract

Arrays of microstrip resonators have recently been shown to be useful for generating linear arrays of microplasmas1. Such arrays show promise for deposition of thin films and ozone generation. Power is shared between the resonators via resonant coupling, allowing a single power input port for the entire array.
用于微等离子体产生的强耦合微带谐振器阵列的电建模
微带谐振器阵列最近已被证明可用于产生微等离子体的线性阵列。这种阵列显示出薄膜沉积和臭氧生成的前景。功率通过谐振耦合在谐振器之间共享,允许整个阵列使用单个电源输入端口。
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