{"title":"Electrical modeling of strongly-coupled microstrip resonator arrays for microplasma generation","authors":"A. Hoskinson, C. Wu, J. Hopwood","doi":"10.1109/PLASMA.2011.5993185","DOIUrl":null,"url":null,"abstract":"Arrays of microstrip resonators have recently been shown to be useful for generating linear arrays of microplasmas1. Such arrays show promise for deposition of thin films and ozone generation. Power is shared between the resonators via resonant coupling, allowing a single power input port for the entire array.","PeriodicalId":221247,"journal":{"name":"2011 Abstracts IEEE International Conference on Plasma Science","volume":"201 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Abstracts IEEE International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2011.5993185","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Arrays of microstrip resonators have recently been shown to be useful for generating linear arrays of microplasmas1. Such arrays show promise for deposition of thin films and ozone generation. Power is shared between the resonators via resonant coupling, allowing a single power input port for the entire array.