Diagnostic expert system application to problem solving in a semiconductor manufacturing facility

Abstract

The development and construction of the expert system, the acquisition and representation of knowledge, and an implementation of the system are discussed. In this implementation, systems covering the photolithography and ion implantation areas were used for full-time production use by manufacturing personnel. Implementation and acceptance issues are addressed. Operators can use the expert systems to solve many routine processing problems that were once the exclusive domain of sustaining engineers. Improvements in the areas of productivity, quality, and downtime were demonstrated.<>