Roman Maisakovskyi, K. Kolesnyk, R. Panchak, Ruslan Golovatskyy
{"title":"Automated simulation of scanning tunneling microscope functional parameters","authors":"Roman Maisakovskyi, K. Kolesnyk, R. Panchak, Ruslan Golovatskyy","doi":"10.1109/MEMSTECH.2016.7507530","DOIUrl":null,"url":null,"abstract":"In this paper cantilever detection methods of microscopy that allow to get an image of surface with high spatial resolution are discussed. The functionality of the scanning tunneling microscope and principle of its operation are analyzed. Basing on the simulated data, it is possible to show how microscope operating parameters affect the results of its measurements.","PeriodicalId":102420,"journal":{"name":"2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2016.7507530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this paper cantilever detection methods of microscopy that allow to get an image of surface with high spatial resolution are discussed. The functionality of the scanning tunneling microscope and principle of its operation are analyzed. Basing on the simulated data, it is possible to show how microscope operating parameters affect the results of its measurements.