Progress in Patterned Filters for Optical Sensors

G. Ockenfuss, R. Sargent, F. V. Milligen
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Abstract

The patterning of optical filters to enable sensors dates back more than 50 years. Today this technology serves numerous aerospace, industrial, and consumer electronics applications. Recent developments include the commercial adoption of processes for patterning filters directly onto CMOS wafers and the expansion of applications into multispectral sensing and imaging.
光学传感器用图案滤波器的研究进展
用于传感器的光学滤光片图案可以追溯到50多年前。今天,这项技术服务于众多航空航天,工业和消费电子应用。最近的发展包括直接在CMOS晶圆上设计滤波器的商业应用,以及将应用扩展到多光谱传感和成像。
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