A CMOS Temperature-to-Frequency Converter with an Inaccuracy of 0.5/spl deg/C (3 /spl sigma/) from -40 to 105/spl deg/C

Abstract

A temperature-to-frequency converter implemented in a standard CMOS process only requires a low-cost batch calibration. Its output frequency is determined by the process-independent (but temperature-dependent) thermal diffusivity of bulk silicon. The converter's inaccuracy is less than plusmn0.5degC (3sigma) over the extended industrial temperature range from -40 to 105degC