CMOS-Compatible 2-Axis Self-Aligned Vertical Comb-Driven Micromirror for Large Field-of-View Microendoscopes

Abstract

A CMOS-compatible 3-mask process for 2-axis self-aligned vertical comb-driven micromirror fabrication is described. Our 1024¿m diameter mirrors exhibit resonance at 2.81kHz, 669Hz, and maximum scan angles of 22°, 12° and 5.0°, 4.5° for resonant and static voltage operation on inner and outer axes. Reflectance confocal images of USAF1951 resolution target and epithelial breast tissue obtained at 3.0fps with 0.49¿m, 4.18¿m lateral and axial resolution over 200×125¿m field of view indicate the potential of these devices for large field-of-view microendoscopes.