Smallest dead volume microvalves for integrated chemical analyzing systems

Abstract

Normally open, normally closed, and three-way microvalves were developed. These microvalves had a simple structure and small dead volume on the order of tens of nl. Each microvalve was driven by a stack-type piezo-actuator and the controllable flow range is from 1 mu l/min to tens of mu l/min. These valves are useful for constructing integrated chemical analyzing systems.<>