Low temperature formation of /spl beta/--FeSi/sub 2/ polycrystalline by pulsed laser deposition and thermal annealing

First IEEE International Conference on Group IV Photonics, 2004. Pub Date : 2004-09-29 DOI:10.1109/GROUP4.2004.1416675

H. Sugawara, S. Nakamura, M. Oouchi, Y. Kumura, T. Shishido, M. Kishi, M. Tsuchiya

引用次数: 0

Abstract

Polycrystalline /spl beta/-FeSi/sub 2/ droplets were successfully formed by an exceptionally low temperature process: the room temperature pulsed laser deposition and a 350 /spl deg/C post-annealing. Their evidences have been derived by microscopic Raman spectroscopy and TEM observation.

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脉冲激光沉积和热退火制备/spl β /—FeSi/sub - 2/多晶

通过室温脉冲激光沉积和350 /spl℃后退火，成功地形成了多晶/spl β /-FeSi/sub 2/液滴。通过显微拉曼光谱和透射电镜观察得到了它们的证据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

First IEEE International Conference on Group IV Photonics, 2004.

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