Prostate cancer biomarker detection by using Si nanowire based electrolyte/NiOx/SiO2/n-Si sensors

2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) Pub Date : 2018-04-01 DOI:10.1109/VLSI-TSA.2018.8403861

Anisha Roy, J. Qiu, S. Maikap

引用次数: 0

Abstract

Sarcosine as a prostate cancer biomarker has been detected by using Si naowire based electrolyte/NiOx/SiO2/n-Si sensor for the first time. A long nanowire (14 ^m) by chemically etched is observed by scanning electron microscope (SEM) images. A 2 nm-thick NiOx membrane on SiO2/n-Si structure shows low concentration of 1 pM H2O2 sensing as well as sarcosine of 10 pM has been detected because Ni²+ oxidation state changes to Ni³+ state.

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基于硅纳米线电解质/NiOx/SiO2/n-Si传感器的前列腺癌生物标志物检测

本文首次采用硅纳米线电解质/NiOx/SiO2/n-Si传感器检测肌氨酸作为前列腺癌的生物标志物。利用扫描电子显微镜(SEM)观察到化学蚀刻的长纳米线(14 ^m)。在SiO2/n-Si结构上制备了2 nm厚的NiOx膜，由于Ni2+的氧化态转变为Ni3+，可以检测到低浓度的1 pM H2O2，也可以检测到10 pM的肌氨酸。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)

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