A novel new concept in hybrid alpha ionization systems

Abstract

A novel ionizer invention based upon a hybrid alpha and pulsed high voltage bias ionizer is presented. It Places the ionizer in the process chamber and biases it remotely through a plastic window using only fields. It performs very nearly identically to such an ionizer with hard wiring to the source. Because the circuit is a capacitor, the ionizer is automatically balanced so there is no need to adjust the balance.