A compact two-axis Lloyd’s mirror interferometer for scale grating fabrication

Abstract

A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.