High Spatial Resolution Auger Electron Spectroscopy (AES) in a Diffusion-Pumped SEM

E. Brandis
{"title":"High Spatial Resolution Auger Electron Spectroscopy (AES) in a Diffusion-Pumped SEM","authors":"E. Brandis","doi":"10.1109/IRPS.1976.362757","DOIUrl":null,"url":null,"abstract":"High spatial resolution Auger electron spectroscopy in an SEX is presented, and aspects of vacuum requirements for AES in a diffusion-pumped SEM are discussed. The vacuum system of a Cambridge Stereoscan* was rebuilt. Auger spectra recorded after 45 minutes of electron bombardment demonstrated that the carbon buildup-due to the polymerization of hydrocarbon molecules can be prevented by using the gas-jet technique. Auger data taken in an unmodified Cambridge Stereoscan, using only the gas-jet technique, is also presented. The spatial resolution of the SEM operating in the Auger mode is a function of necessary beam current, lens aberrations, and gun brightness. In the existing SEX equipped with a LaB6 electron gun, beam diameters of 0.4 ¿m containing 4 x 10¿7 A at 20 kV were obtained. This allowed the recording of greyscale Auger images with less than 0.5 ¿m spatial resolution in 400 sec.","PeriodicalId":428300,"journal":{"name":"14th International Reliability Physics Symposium","volume":"62 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1976-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1976.362757","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

High spatial resolution Auger electron spectroscopy in an SEX is presented, and aspects of vacuum requirements for AES in a diffusion-pumped SEM are discussed. The vacuum system of a Cambridge Stereoscan* was rebuilt. Auger spectra recorded after 45 minutes of electron bombardment demonstrated that the carbon buildup-due to the polymerization of hydrocarbon molecules can be prevented by using the gas-jet technique. Auger data taken in an unmodified Cambridge Stereoscan, using only the gas-jet technique, is also presented. The spatial resolution of the SEM operating in the Auger mode is a function of necessary beam current, lens aberrations, and gun brightness. In the existing SEX equipped with a LaB6 electron gun, beam diameters of 0.4 ¿m containing 4 x 10¿7 A at 20 kV were obtained. This allowed the recording of greyscale Auger images with less than 0.5 ¿m spatial resolution in 400 sec.
扩散泵浦扫描电镜中的高空间分辨率俄歇电子能谱(AES)
介绍了sexa的高空间分辨率俄歇电子能谱,并讨论了扩散泵浦扫描电镜中AES的真空要求。重建了剑桥立体扫描仪*的真空系统。在45分钟的电子轰击后记录的俄歇光谱表明,由于碳氢化合物分子聚合而产生的碳积聚可以通过使用气体喷射技术来防止。本文还介绍了在未修改的剑桥立体扫描仪上仅使用气体喷射技术所获得的俄歇数据。在俄歇模式下工作的扫描电镜的空间分辨率是必要的光束电流、透镜像差和枪亮度的函数。在现有的装有LaB6电子枪的SEX中,在20 kV下获得了直径为0.4 μ m,含4 × 10 μ 7 a的光束。这允许在400秒内以小于0.5微米的空间分辨率记录灰度俄歇图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信