{"title":"High Spatial Resolution Auger Electron Spectroscopy (AES) in a Diffusion-Pumped SEM","authors":"E. Brandis","doi":"10.1109/IRPS.1976.362757","DOIUrl":null,"url":null,"abstract":"High spatial resolution Auger electron spectroscopy in an SEX is presented, and aspects of vacuum requirements for AES in a diffusion-pumped SEM are discussed. The vacuum system of a Cambridge Stereoscan* was rebuilt. Auger spectra recorded after 45 minutes of electron bombardment demonstrated that the carbon buildup-due to the polymerization of hydrocarbon molecules can be prevented by using the gas-jet technique. Auger data taken in an unmodified Cambridge Stereoscan, using only the gas-jet technique, is also presented. The spatial resolution of the SEM operating in the Auger mode is a function of necessary beam current, lens aberrations, and gun brightness. In the existing SEX equipped with a LaB6 electron gun, beam diameters of 0.4 ¿m containing 4 x 10¿7 A at 20 kV were obtained. This allowed the recording of greyscale Auger images with less than 0.5 ¿m spatial resolution in 400 sec.","PeriodicalId":428300,"journal":{"name":"14th International Reliability Physics Symposium","volume":"62 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1976-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"14th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1976.362757","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
High spatial resolution Auger electron spectroscopy in an SEX is presented, and aspects of vacuum requirements for AES in a diffusion-pumped SEM are discussed. The vacuum system of a Cambridge Stereoscan* was rebuilt. Auger spectra recorded after 45 minutes of electron bombardment demonstrated that the carbon buildup-due to the polymerization of hydrocarbon molecules can be prevented by using the gas-jet technique. Auger data taken in an unmodified Cambridge Stereoscan, using only the gas-jet technique, is also presented. The spatial resolution of the SEM operating in the Auger mode is a function of necessary beam current, lens aberrations, and gun brightness. In the existing SEX equipped with a LaB6 electron gun, beam diameters of 0.4 ¿m containing 4 x 10¿7 A at 20 kV were obtained. This allowed the recording of greyscale Auger images with less than 0.5 ¿m spatial resolution in 400 sec.