{"title":"РАЗРАБОТКА СТЕНДА ДЛЯ ИССЛЕДОВАНИЯ ФУНКЦИОНИРОВАНИЯ МИКРОМЕХАНИЧЕСКИХ ПРИБОРОВ","authors":"Ярослав Владимирович Кириленко, С. И. Сакович","doi":"10.46916/17112021-2-978-5-00174-373-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":325828,"journal":{"name":"РАЗРАБОТКА СТЕНДА ДЛЯ ИССЛЕДОВАНИЯ ФУНКЦИОНИРОВАНИЯ МИКРОМЕХАНИЧЕСКИХ ПРИБОРОВ","volume":"117 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"РАЗРАБОТКА СТЕНДА ДЛЯ ИССЛЕДОВАНИЯ ФУНКЦИОНИРОВАНИЯ МИКРОМЕХАНИЧЕСКИХ ПРИБОРОВ","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.46916/17112021-2-978-5-00174-373-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}