MEMS deformable mirrors for adaptive optics using single crystal PMN-PT

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607843

Hyunkyu Park, D. Horsley

引用次数: 4

Abstract

A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.

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基于单晶PMN-PT的MEMS自适应光学变形镜

提出了一种用于眼科自适应光学的基于mems的单晶PMN-PT变形镜。介绍了DM的制备工艺和表征结果。大行程和高工作带宽保证了DM是一种很有前途的波前校正器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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