Aluminum Nitride Photonics Platforms on Silicon Substrate

2021 Conference on Lasers and Electro-Optics (CLEO) Pub Date : 2021-05-01 DOI:10.1364/cleo_si.2021.sth2h.3

Nanxi Li, C. Ho, Yanmei Cao, Shiyang Zhu, G. Chen, Yuan Hsing Fu, Yao Zhu, D. Tan, L. Lee

引用次数: 2

Abstract

The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.

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硅衬底氮化铝光子学平台

介绍了微电子研究所研制的cmos兼容AlN光子学平台，并报道了AlN的非线性指标。对所展示的光电器件进行了综述，并展望了未来的发展前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2021 Conference on Lasers and Electro-Optics (CLEO)

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