Mach-Zehnder interferometer with Fabry-Perot cavities in silicon-on-insulator for biosensing

M. Mendez-Astudillo, H. Okayama, H. Nakajima
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Abstract

We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.
生物传感用绝缘体上硅法布里-珀罗腔马赫-曾德干涉仪
我们在马赫-曾德干涉仪的两个臂上展示了一个基于布拉格光栅反射镜的法布里-珀罗腔。该器件由绝缘体上硅制成,可用于表征波导参数,并可获得具有温度补偿方案的高精度敏感传感器。
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