{"title":"Mach-Zehnder interferometer with Fabry-Perot cavities in silicon-on-insulator for biosensing","authors":"M. Mendez-Astudillo, H. Okayama, H. Nakajima","doi":"10.23919/MOC.2017.8244526","DOIUrl":null,"url":null,"abstract":"We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.","PeriodicalId":123743,"journal":{"name":"2017 22nd Microoptics Conference (MOC)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 22nd Microoptics Conference (MOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MOC.2017.8244526","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.