Thin Oxide Films for Transparent Electronics and Full Color Displays

Abstract

The cathodoluminescence properties of thin oxide films $\beta-\mathbf{Ga}2\mathbf{O}_{3},\mathbf{ZnGa}_{2}\mathbf{O}_{4},\mathbf{ZnGn}_{2}\mathbf{O}_{4}:\mathbf{Mn},\mathbf{Zn}\mathbf{Ga}_{2}\mathbf{O}_{4}:\mathbf{Cr},\mathbf{Y}_{2}\mathbf{O}_{3}:\mathbf{Eu},\mathbf{Gd}_{2}\mathbf{O}_{3}:\mathbf{Eu},(\mathbf{Gd}_{2}\mathbf{O}_{3})_{0.67}(\mathbf{ZnO})_{0.33}: \mathbf{Eu},(\mathbf{Y}_{0.06}\mathbf{Ga}_{0.94})_{2}\mathbf{O}_{3}: \mathbf{Eu}$ and $(\mathbf{Y}_{0.06}\mathbf{Ga}_{0.94})_{2}\mathbf{O}_{3}$: Cr obtained by high-frequency (HF) ion-plasma sputtering on fused silica substrates. A number of luminescence parameters have been determined and it has been shown that a full-color flat-panel display can be realized on the basis of these films. It is shown that the use of reductive annealing of these films in a hydrogen atmosphere leads to an increase in the electrical conductivity of the films by a factor of $10^{3}-10^{8}$. The results were discussed and it was found that electrically conductive thin-film phosphors $\beta-\mathbf{Ga}_{2}\mathbf{O}_{3}$ (blue luminescence), $\mathbf{Gd}_{2}\mathbf{O}_{3}:\mathbf{Eu}$ (red luminescence) and especially $(\mathbf{Gd}_{2}\mathbf{O}_{3})_{0.67}(\mathbf{ZnO})_{0.33}: \mathbf{Eu}$ (red luminescence) are quite promising for use in full-color displays with the point of view of their luminescent and energy properties.