Improving Minimum Feature Sizes of Subwavelength Grating Slot Waveguide Optical Sensors

Abstract

We show that the minimum feature size of subwavelength grating slot waveguides can be increased from 60 nm to 120 nm with enhanced fabrication tolerance and only 13 nm/RIU reduction in the bulk sensitivity from 538 nm/RIU to 525 nm/RIU.