Indium-Zinc-Oxide Electric-Double-Layer Thin-Film Transistors for Humidity Sensing

Abstract

Indium-zinc-oxide electric-double-layer (EDL) thin-film-transistors (TFTs) were fabricated on ITO glass substrates gated by agar electrolyte dielectrics. The humidity-dependent device performance was tested such as specific capacitance of the agar electrolyte, transfer characteristics, and gate leakage current. The humidity-dependent characteristics indicate that the EDL TFTs have potential applications in humidity sensing.